The positioning system of the ElProScan |
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High precision stepper motors mounted on a stable holder made of granite are the basis of the
positioning system of ElProScan.
All three axis are equipped with Linear Encoders of 1 nm precision. The encoders are operated in a closed loop mode to eliminate backlashes between different lines in a scan. High precision real time controlled positioning system mounted on a stable holder made of granite, resolution in XY: 100 nm or 15nm stepper motors, resolution in Z: 100 nm stepper motor + Fast real time controlled Z-piezo with 5 nm resolution and 100 mm scan range, closed loop regulated. The system comprises a large scan area (50 mm on each axis) with accurate position control and a fine piezo-driven z positioning. |
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